ࡱ> Root Entry7ȘFileHeaderEDocInfo>jBodyText ).Ș).Ș !"#$%&Root Entry}FileHeaderEDocInfo;oBodyText a }a } HwpSummaryInformation.3PrvImagePrvTextDocOptions }}Scripts }}JScriptVersion L DefaultJScriptI_LinkDocM   !"#$%&'()*+,-./012456789:<=>?@ABCDFGHJKNOPQRSTUWXYZ[\]^_`abcdeOLED )0 8 <8x 8Xǔ l 8XȲ.> - Ɍ glove box P X ) chamber, (OLED +   ) (X՘X pumping system<\ P X chamber| <\ pump) - stainless steel bell jar 2 (ɽ 300 mm, t 300 mm) - rotary vane pump 400 liter/min t - 6xX diffusion pump - 8 ٳ - ɹPخ!0 2 (Cressington MTM 10) - t(ƌt 2 (| diavac ITL-20P + IV 2000 t) - thermocouple t 4 - EѤP ҩ 300 TŘӴ  2 (U0 ) - glove box dry trap (, „ a), ɽ 160 mm, t 500 mm) - glove box blower (40 cfm ɷ) - glove box antechamber (ɽ 150 mm, 8t 350 mm) - glove box  200 liter/min GIF89aɻxxxkkk]]]PPPCCC555((( d`LH00`Hذ̘`H0|pdXL@`0H `H0`dHL`H0xp`XH@0d LȰ``HH00dLؘȀ`H0xp`XH@d0L `H0d`LH`H0|pdXL@0`$H`dHL00`HذȘdL0xp`XH@0` HdH0ȳ``HHdL0xp`XH@`0H Ը̰ĠऀؘpȈXxHp@h@d8`8X0xT0pH dxddxd`d`p`|``x`p``x`!, H*\ȰÇ#JHŋ3jȱǏ CIɓ(S\ɲ˗0cʜI͛8sɳϟ@ JѣH*]ʴӧPJJիXjʵׯ`ÊKlKhSvڵomsbKn޹|dK8_-̸[Å"}/> WdxnӨS^ͺװc뵻`чGsV4޾;[M+m/vlXb浡{rՇ N|zym vfCƍ>=xo˞Ouc^|vVzwuVp9mŅ ^&bx(Lbh!`zrt.n![(7='C  DߑHRu $88\mI%v:biz+2hx4&AvWR0~(WY'|nvceN䡈&C5rH|rɱ\.Iom]"bVjJg*ʦuHau9䅉:ABhfaɢZr驇ޕ8dy謦\J:sw >&vmP:O謱ő ,m fj-)H%of.{⒙&ovﳜ @jye#*! 1tY 4ƭ =8]WXi`BjQNKv))pt2$;3:n F[j>EpDj9]^feNk旵t_{Eی7X/]㤭J FTGN4Ϧ9`+vVX:5C1{!HB/{u>h#w8+{Ìl0K]^t#bݾ؂פ^Yt6 `Yel9g5iIpl6@/2'J>G9o/,k%6\4 79|3کVXH(shkbRY;(!`>=/lĕ.t [j|ػlcegS jPH:x̣> IBL"F:򑐌$'IJZ̤&7Nz (GIRL*WV򕰌,gIZ̥.w^ 0IbL2Ȁ;`a``a`0x ( p | OLED )0 8i 2012D 1 4| ”| $ 10:09:33i  7, 5, 12, 616 WIN32LEWindows_XP@`u}@a }@햿o@ǿ>8cl U"BB\JU!U-B 9#C@U&) YTnb.Q˻wwSev ?$7NM9U֛a_d,f%pxǨ3]/#anVOb1iġf{l| pͳ_>z=?'챷<^iU["] ?CH;n/*M,:a_^p\pE pYkVo]Y=ʚ0Section0V_Nu )7w-lBth*錦ZHM]T;s g8lk|W\U"" GK%ӭxkaMqr wFY?-:D pHJDB [S$+c"XRrv>"%̾ËkݱU<Vd2G} wxYp[RirNgwo #;˩H˭$nxm8FpGL]^eBdˣ]p HWP Document Fileu@DO 6C,H,#GB!k0~ 6*7=M*Z:ҙ#?*?ӿT@Y~X+mj3'm[v|:j)%C$Mϼ5#cd߈~1\LOCALS~1\Temp\prv00000e080998.gifȞDPpv;`|hA|( ]|Q!4|p(^` ;` ` ܡB͕| 'eJeJ |`|]|R|| |`|?`?_`` |h|`||||_`0h|h?Hpvh0vx_`0vx_`0vHpvx_`D1vcvHpv<`sax`QugUKQ?;n YVR2Pȯ@D,E4]+kWEWazHXTPk7f%wvAD :Ύ[s);sw~ hN `P)f8m=yL؜NGt| pJʣP%JlZ,7i*fM\O]Y#;D'ML>^a`@ԴJ"\l:.-qg65qaJPfjD([b d[*)4K[ lUL٢a$s)˅WЌ`n^ٔcAפO EFC3gCDD:hD7.]op['.ْj n :p4.4MQIn\pWfĨw"S#U }3<.1|WvmOSl]Ћ:0=0An(Ub㈏`p=> !u扇75D]AqNqR"F"Xp0\.vuci J7 ?e<{:$RݨC5>ѳ#=B%Q2ղ8ȶ+U^vġ# - Ɍ glove box P X ) chamber, (OLED +   ) (X՘X pumping system<\ P X chamber| <\ pump) - stainless steel bell jar 2 (ɽ 300 mm, t 300 mm) - rotary vane pump 400 liter/min t - 6xX diffusion pump - 8 ٳ - lЬ < tǩ\ ɹPخ!0 1 (!ȥnj 2 chamber) - t(ƌt 1 + t(ƌt 2 (!ȥnj 2 chamber) - thermocouple t 3 (2X chamber + mechanical pump l) - EѤP ҩ 300 TŘӴ  2 (U0 ) - glove box dry trap (, „ a), ɽ 160 mm, t 500 mm) - glove box blower (40 cfm ɷ) - glove box antechamber (ɽ 150 mm, 8t 350 mm) - glove box  200 liter/min (( d`LH00GIF89aɻxxxkkk]]]PPPCCC555((( d`LH00`Hذ̘`H0|pdXL@`0H `H0`dHL`H0xp`XH@0d LȰ``HH00dLؘȀ`H0xp`XH@d0L `H0d`LH`H0|pdXL@0`$H`dHL00`HذȘdL0xp`XH@0` HdH0ȳ``HHdL0xp`XH@`0H Ը̰ĠऀؘpȈXxHp@h@d8`8X0xT0pH dxddxd`d`p`|``x`p``x`!, H*\ȰÇ#JHŋ3jȱǏ CIɓ(S\ɲ˗0cʜI͛8sɳϟ@ JѣH*]ʴӧPJJիXjʵׯ`ÊKlKhSvڵomsbKn޹|dK8_-̸[Å"}/> WdxnӨS^ͺװc뵻`чGsV4޾;[M+m/vlXb浡{rՇ N|zym vfCƍ>=xo˞Ouc^|vVzwuVp9mŅ ^&bx(Lbh!`zrt.n![(7='C  DߑHRu $88\mI%v:biz+2hx4&AvWR0~(WY'|nvceN䡈&C5rH|rɱ\.Iom]"bVjJg*ʦuHau9䅉:ABhfaɢZr驇ޕ8dy謦\J:sw >&vmP:O謱ő ,m fj-)H%of.{⒙&ov{ġ&$9嚑m_-%)qth1v֙:+3L5G`CC G4RI6߼s\m .{p66#Υt*2P (GIRL*WV򕰌,gIZ̥.w^ 0IbL2f:Ќ4IjZ̦6nz 8IrL:v~' ;OLED )0`a``a`0x ( p | OLED )0 8i 2012D 1 4| ”| $ 10:09:33i  7, 5, 12, 616 WIN32LEWindows_XP@`u}@).Ș@Ob1iġf{l| pͳ_kAǿ;j `~5"bs5RHI sdD\ܣG/`NCjIHT }?@AAsd:errgܜ~svt)?PAfn G NFKڰ SGZ,#4/MNBdmjkWkȱ* :pY[ X~6^Q[CvuAko9}#5BQJ7̀¿zF`P匹yvP8[jĶȴx6\UHL^xJh`X셒<ؗ.ga#SkEwsc6`JVX菤b]a-zR[.@IF/y ͩQ#jO1&#L(1Z׋>ueʮꑋU}z}S=ޡ2ʱa:cS5 8Cv:5NW%s#PSR_W@~